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New method monitors semiconductor etching as it happens -- with light |
September 29, 2012
Researchers have a new low-cost method to carve delicate features onto semiconductor wafers using light -- and watch as it happens. The technique can monitor a semiconductor's surface as it is etched, in real time, with nanometer resolution. This allows the researchers to create complex patterns quickly and easily, and adjust them as needed.
Link: http://feeds.sciencedaily.com/~r/sciencedaily/computers_math/computer_science/~3/wdI2J7mlIZM/120928141058.htm
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